A Large Voltage Responsivity Pyroelectric Sensor Based on Hot-Pressed Lead Zirconate Titanate Ceramic
In this article, hot-pressed PZT ceramics were used as a sensitive element material and made into a pyroelectric chip. Three current mode sensors were fabricated using a pyroelectric chip of different thicknesses (80 μm, 40 μm, and 30 μm). The voltage responsivity of sensors reached the order of magnitude of 10<sup>5</sup>. The size effect resulting from varying the thickness was studied. The results indicate that as the thickness decreases, the performance significantly increases. When the modulation frequency is 10 Hz, the specific detectivity of the sensor with a 30 μm PZT ceramic pyroelectric chip reaches 5.3 × 10<sup>8</sup> cm·Hz<sup>1/2</sup>/W.
Authors
- Zhiwei Pan (ORCID: https://orcid.org/0000-0002-4004-8290)
- Shaobo Guo (ORCID: https://orcid.org/0000-0002-8883-6237)
- Chunhua Yao
- Yangziye Guo
- Genshui Wang (ORCID: https://orcid.org/0000-0002-5077-6574)
Institutions
- Chinese Academy of Sciences (CN)
- Shanghai Institute of Ceramics (CN)
- University of Chinese Academy of Sciences (CN)
Publication Details
- Journal
- Sensors
- Published
- 2025-02-03
- DOI
- https://doi.org/10.3390/s25030917
- Citations
- 1
- Primary Topic
- Gas Sensing Nanomaterials and Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- Chinese Academy of Sciences