Effect of active layer thickness on device performance of InSnZnO thin-film transistors grown by atomic layer deposition

Amorphous oxide semiconductors have garnered significant attention in recent years for their potential in flat-panel displays and back-end-of-line-compatible monolithic 3D (M3D) integration applications. This study explores amorphous InSnZnO thin films deposited via plasma-enhanced atomic layer deposition (PEALD) and the development of high-performance PEALD ITZO thin-film transistors (TFTs) with different active layer thicknesses, fabricated under a low thermal budget of 200 °C. By optimizing the deposition process of binary oxides InOx, SnOx, and ZnOx, a shared temperature window of 170-180 °C was identified for ITZO thin-film deposition. The deposited ITZO films, irrespective of thickness, exhibit an amorphous phase. Moreover, a reduction in ITZO film thickness from 24 to 4.8 nm leads to an increase in the optical bandgap from 3.35 to 3.65 eV. The channel thickness significantly impacts the threshold voltage and carrier density of ITZO TFTs. Optimized ITZO TFTs with a 16 nm channel thickness demonstrate excellent electrical performance, including a threshold voltage of -0.58 V, a field-effect mobility of 29 cm2/V s, an on/off ratio exceeding 108, and a subthreshold swing of 74 mV/dec. Furthermore, the optimized ITZO TFT exhibits excellent stability under positive bias stress at 2 MV/cm, with a threshold voltage shift of 0.15 V after 3600 s. Consequently, ALD-based ITZO emerges as a promising channel material for future applications in transparent electronics and flat-panel displays.