Micromarking Device for Samples Based on an Engraving Machine

The article relates to the field of contact power nano- and microlithography used for marking samples and surface areas examined with high-resolution microscopes. The device of a marking machine built on the basis of a commercially available Generic-CNC2418 engraving machine with program control in G-codes and using a tungsten probe as a working tool is described. A process for operating the motors of the marking machine based on the monitoring of the probe-surface contact by means of an optical microscope is described. The marking obtained with the help of such a probe is a pattern of individual probe imprints. The marker drives ensure positioning accuracy of 10 μm. The transverse size of the resulting marking prints is 10–15 μm. The marker is recommended for use on surfaces with a roughness of Ra no more than 0.1 μm and a Mohs hardness of no more than 7.5.