Spectroscopic Ellipsometry and Wave Optics: A Dual Approach to Characterizing TiN/AlN Composite Dielectrics

In this paper, we present a method for retrieving the optical properties of a nano-designed TiN/AlN composite dielectric, using spectroscopic ellipsometry for experimental measurements and wave optics simulations for numerical analysis. Composite cermets have gained attention for solar–thermal energy conversion, but their fundamental optical properties are not well understood. While characterizing uniformly deposited layers is generally straightforward, the process becomes more complex for nanoparticulate composites. The refractive index is essential for investigating and tuning the optical characteristics of the composite. Our method employs COMSOL Multiphysics software, validated by experimental spectroscopic ellipsometry studies. The strong agreement between experimental and numerical results supports this approach as a rational way to design material models for optical property studies across a broad spectrum.