Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source
Tungsten oxide (WO3−X) nanowire field emitters have important applications in vacuum microelectronic devices, such as cold cathode flat panel x-ray sources. In this study, large-area, high current density, and defect-rich monoclinic WO3−X nanowires were directly synthesized on a glass substrate by thermal oxidation. Field emission measurements from a 4.5 × 4.5 cm2 sample show that a turn-on field of 4.8 MV/m and a high current density of 15.2 mA/cm2 were achieved. Stable emission current with a fluctuation of 1.78% was obtained. Furthermore, a flat panel x-ray source with a reflective anode was fabricated using as-grown WO3−X nanowires as the cold cathode. A radiation dose rate of 1.83 mGy/s was obtained at an anode voltage of 60 kV and a current of 484.1 μA. X-ray imaging experiments were carried out and clear imaging results were obtained. This work is significant for promoting the application of WO3−X nanowires in large-area field emission devices.
Authors
- Chengyun Wang (ORCID: https://orcid.org/0009-0003-2927-649X)
- Zufang Lin
- Guichen Song (ORCID: https://orcid.org/0000-0001-8669-1815)
- Shaozhi Deng (ORCID: https://orcid.org/0000-0003-1830-2026)
- Song Kang (ORCID: https://orcid.org/0009-0008-7495-9704)
- Jun Chen (ORCID: https://orcid.org/0000-0001-7397-2714)
- Qi Liu (ORCID: https://orcid.org/0000-0001-7930-4418)
- Ningsheng Xu
Institutions
- South China Agricultural University (CN)
- Sun Yat-sen University (CN)
Publication Details
- Journal
- Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
- Published
- 2025-01-27
- DOI
- https://doi.org/10.1116/6.0004123
- Citations
- 3
- Primary Topic
- Transition Metal Oxide Nanomaterials
- Type
- article
- Field-Weighted Citation Impact
- 1.82
Funders
- National Key Research and Development Program of China