Impact of Electron Beam Energy and Dose on the Microstructure and Performance of e-PDMS-TEP Coatings
The energy and dose of electron beam (EB) are crucial in the process design of EB curing. Taking the e-PDMS-TEP coating on Q235 steel surface as an example, this study, combined with Monte Carlo simulation and experimental validation, investigates the crosslinking characteristics of the coating under energy ranges of 100 to 200 keV and doses of 0 to 800 kGy. The findings reveal that the coating can be effectively cured within a range of energy from 200 ke V to 160 ke V, with the necessary dose escalating as energy decreases. However, excessive energy may lead to coating degradation, whereas insufficient energy might result in incomplete curing. The simulation outcomes provide partial guidance for EB process design.
Authors
- Jiang Huang (ORCID: https://orcid.org/0000-0001-8959-325X)
- Keyan Sheng
- Zhenyi Zhang (ORCID: https://orcid.org/0009-0001-5933-9071)
- Haozhe Li (ORCID: https://orcid.org/0000-0003-2764-7106)
- Zijian Zhou (ORCID: https://orcid.org/0000-0001-7401-7612)
- Jiangrui Xing
Institutions
- Huazhong University of Science and Technology (CN)
Publication Details
- Published
- 2024-11-06
- DOI
- https://doi.org/10.1109/ciycee63099.2024.10846614
- Primary Topic
- Advancements in Photolithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00