Experimental Study of a Large Area High PDE SiPM in 0.11- <i>μ</i> m CMOS Process for PET Applications

Silicon photomultipliers (SiPMs) fabricated in a standard complementary metal-oxide-semiconductor (CMOS) process enable the development of cost-effective, reliable, and power-efficient photosensors for positron emission tomography (PET) applications. However, PET manufacturers prefer SiPMs in customized technologies for their high photon detection efficiency (PDE) and low noise, which are crucial parameters for energy and time resolution in PET scanners. Recently, RAYQUANT Technology Ltd. has developed a high PDE SiPM fabricated in 0.11-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m CMOS process, with large area of 9 mm2. This article investigates for the first time the ability of this SiPM to collect scintillation light from LYSO crystals for PET applications, evaluating energy resolution, and coincidence time resolution (CTR). The LYSO/SiPM detector achieves the best energy resolution (FWHM) of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(28. 0\pm 1.0)}$ </tex-math></inline-formula>% at 60 keV, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(10.6\pm 0.4)}$ </tex-math></inline-formula>% at 511 keV, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(8.5\pm 0.4)}$ </tex-math></inline-formula>% at 662 keV. The best CTR (FWHM) is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(172\pm 2)}$ </tex-math></inline-formula> ps, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(147\pm 2)}$ </tex-math></inline-formula> ps, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(115\pm 1)}$ </tex-math></inline-formula> ps, when the SiPM is coupled to crystals of 20, 10, and 5 mm length, respectively. These results confirm that the studied CMOS-based SiPM is not only suitable for PET applications but is even competitive with SiPMs fabricated in customized technologies.

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Journal
IEEE Transactions on Radiation and Plasma Medical Sciences
Published
2025-01-27
DOI
https://doi.org/10.1109/trpms.2025.3534221
Primary Topic
Semiconductor materials and devices
Type
article
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0.00

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article

Experimental Study of a Large Area High PDE SiPM in 0.11- μ m CMOS Process for PET Applications

N. d’Ascenzo, Daniele Passaretti, Jingbin Chen, Qingguo Xie et al.
IEEE Transactions on Radiation and Plasma Medical Sciences
Semiconductor materials and devices
article

Experimental Study of a Large Area High PDE SiPM in 0.11- μ m CMOS Process for PET Applications

N. d’Ascenzo, Daniele Passaretti, Jingbin Chen, Qingguo Xie, Yuexuan Hua, H. Lao
article en

Abstract

Silicon photomultipliers (SiPMs) fabricated in a standard complementary metal-oxide-semiconductor (CMOS) process enable the development of cost-effective, reliable, and power-efficient photosensors for positron emission tomography (PET) applications. However, PET manufacturers prefer SiPMs in customized technologies for their high photon detection efficiency (PDE) and low noise, which are crucial parameters for energy and time resolution in PET scanners. Recently, RAYQUANT Technology Ltd. has developed a high PDE SiPM fabricated in 0.11-<inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m CMOS process, with large area of 9 mm2. This article investigates for the first time the ability of this SiPM to collect scintillation light from LYSO crystals for PET applications, evaluating energy resolution, and coincidence time resolution (CTR). The LYSO/SiPM detector achieves the best energy resolution (FWHM) of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(28. 0\pm 1.0)}$ </tex-math></inline-formula>% at 60 keV, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(10.6\pm 0.4)}$ </tex-math></inline-formula>% at 511 keV, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(8.5\pm 0.4)}$ </tex-math></inline-formula>% at 662 keV. The best CTR (FWHM) is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(172\pm 2)}$ </tex-math></inline-formula> ps, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(147\pm 2)}$ </tex-math></inline-formula> ps, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mathbf {(115\pm 1)}$ </tex-math></inline-formula> ps, when the SiPM is coupled to crystals of 20, 10, and 5 mm length, respectively. These results confirm that the studied CMOS-based SiPM is not only suitable for PET applications but is even competitive with SiPMs fabricated in customized technologies.

IEEE Transactions on Radiation and Plasma Medical SciencesVol. 9(6)
University of Science and Technology of China (CN), Cell Technology (China) (HK), Otto-von-Guericke-Universität Magdeburg (DE)
National Natural Science Foundation of China, University of Science and Technology of China
Openalex Percentile: Top 99%
Semiconductor materials and devices
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