Development of pulse shape controlled DUV solid-state light source for hybrid ArF laser

We are developing a hybrid ArF laser, consisting of solid-state laser oscillator and ArF amplifier, for laser material processing at 193-nm. To find the optimum configurations of laser processing for various materials, a pulse shape controlling system is required for the hybrid ArF laser. We have developed an Er-doped fiber laser and an optical parametric amplifier (OPA) in the solid-state laser oscillator which can change the pulse width from 5-ns to 20-ns with 1-ns resolution, also can generate the 0.5-ns burst pulse with the temporal separation of 3-ns.