Applications of RF Thin Film Integrated Passive Device in Heterogeneous System Integration
This paper introduces thin-film integrated passive device (IPD) technologies with a focus on high resistivity silicon (HRS) IPD and Gaas IPD. Based on thin-film IPD technologies, various RF passive devices including filters and other passive components are discussed and RF module for the heterogeneous system integration is demonstrated.
Authors
- Changwei Wang (ORCID: https://orcid.org/0000-0001-8259-7717)
- Liguo Sun (ORCID: https://orcid.org/0000-0002-3129-5097)
- Mingjie Liu (ORCID: https://orcid.org/0000-0002-7336-8282)
- Haoyu Cao (ORCID: https://orcid.org/0009-0002-7144-5456)
- Wei Huang (ORCID: https://orcid.org/0000-0002-6983-3751)
- Biao Deng
Institutions
- University of Science and Technology of China (CN)
Publication Details
- Published
- 2024-10-23
- DOI
- https://doi.org/10.1109/isape62431.2024.10840873
- Primary Topic
- Semiconductor Lasers and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00