Enhancement of Al Microsphere Fabrication by Utilizing Electromigration in Sudden Change in Geometrical Shape of Sample

The utilization of electromigration for enhancement of microspheres using sudden change in geometrical shape of sample was investigated. The experimental sample of Al metal line is formed on a TiN layer and covered with a SiO2 passivation layer. The experimental results revealed that sudden change in geometrical shape of specimen significantly affects temperature, current density and current stressing time to enhance atomic accumulation for growing microspheres. The experimental results are explained in the discussion. A finite element analysis was done to investigate the effect of temperature profile due to sudden change in crosssectional area of a sample structure