A Compound Piezo Drive for Nanotechnology and Nanochemistry Research

INTRODUCTION A compound piezo drive is applied for nanotechnology and nanochemistry research [1-17]. This drive based on the piezoelectric effect [18-40]. A compound piezo drive is used in scanning microscopy, adaptive optics, interferometry, nanostabilization [41-53]. The deformations of a compound piezo drive are written by using its model and scheme. The model, scheme and functions are obtained by applied the method of mathematical physics. The compound piezo drive is widely used in practice at the voltage control. Therefore, in the article considers the structural schemes of the composite piezo drive under various boundary conditions its operation.