High-throughput material search by magnetic and compositional mapping of reactively sputtered combinatorial FexVyNz films

Despite the many advantages afforded to the investigation of complex compositional systems by combinatorial sputtering, the application of this synthesis technique is hindered by high-throughput characterization bottlenecks. The recent application of translatable compositional and magnetic characterization techniques, such as precision Wavelength Dispersive X-ray Fluorescence (WDXRF) and Magneto-Optic Kerr Effect (MOKE), are enabling for full wafer mapping of film chemistry, magnetic moment, and coercivity, although under-applied. An example system that stands to benefit from the application of combinatorial sputtering and high-throughput characterization is lightly nitrided FexVyNz, which, among other doped FeN materials, is a candidate rare earth-free permanent magnet for electric motor and read/write head applications. Within this report, a combinatorial sputtering and characterization procedure, which leverages high-throughput WDXRF and MOKE mapping, is utilized to investigate the effects of V composition on the room temperature ferromagnetic properties of FexVyNz. Observations made using WDXRF and MOKE mapping are shown to closely agree with vibrating sample magnetometry and x-ray photoelectron spectroscopy measurements made on cleaved regions of interest from the parent wafer. It is observed that the inclusion of V deleteriously affects the saturated moment of FeN, resulting in complete macroscopic reduction at 18 at. %. A maximum film coercivity of 165 Oe is observed at 10 at. % V, likely contributed to by crystallographic texture due to processing, followed by a complete reduction along with the saturated moment. These observations support the high-throughput characterization approaches of WDXRF and MOKE to combinatorial synthesis workflows.