Top-down micro and nano structuring of wide bandgap semiconductors for ultraviolet photodetection
This review focuses on top-down dry and wet etching of III-nitrides, SiC, Ga 2 O 3 , and diamond to create micro/nanostructured UV photodetectors, enabling enhanced light trapping and improved device performance.
Authors
- Yikai Liao (ORCID: https://orcid.org/0000-0002-7046-8819)
- Ramit Kumar Mondal (ORCID: https://orcid.org/0000-0003-1675-4184)
- Munho Kim (ORCID: https://orcid.org/0000-0002-0379-1886)
- Jiangnan Dai (ORCID: https://orcid.org/0000-0001-9805-8726)
- Zhihua Zheng (ORCID: https://orcid.org/0000-0003-3296-6785)
- You Jin Kim
Institutions
- Nanyang Technological University (SG)
- Wuhan National Laboratory for Optoelectronics (CN)
- Huazhong University of Science and Technology (CN)
Publication Details
- Journal
- Journal of Materials Chemistry C
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1039/d4tc03230f
- Citations
- 9
- Primary Topic
- Ga2O3 and related materials
- Type
- article
- Field-Weighted Citation Impact
- 3.85