A 0.67 A mm⁻² package integrated CMOS class-D LC oscillator converter

Abstract In this paper, a CMOS class-D LC oscillator converter is proposed and fully integrated into a Cu core package EOMIN TM including inductors and capacitors to achieve high current density power delivery. The proposed CMOS class-D LC oscillator cell can be realized by only using low voltage 1.2 V core transistors in a 65 nm CMOS process. On-die capacitors are adopted for flying capacitors, while input and output MLCC capacitors and two air core package trace inductors are integrated into a Cu core package. From the measurements, a maximum efficiency of 57% and maximum current density of 0.67 A mm −2 are achieved.