Discrete Event Control for the Automation of Reactive Sputter Plants

In this contribution a new discrete event control scheme is proposed to ensure a defined and a reproducible process in reactive sputtering plants. The control scheme is based on a novel hybrid model that describes the pressure behaviour and the electrical behaviour of such processes. A new automation system is developed to allow the experimental validation of the control scheme, which consists of two parts. An interlock control prevents prohibited process states and a sequence control ensures a desired sequence of process states. Experimental data are shown to demonstrate the applicability of the discrete event control scheme and of the automation system.