International Standardization of Terminology, Sample Handling and Data Transfer Format for Scanning Probe Microscopy

The current status and future prospects of international standardization of terminology, sample handling and data formats in international standardization on SPM are presented. As these standards are the basis for all standards on SPM, they were developed as a priority when ISO/TC 201 and ISO/TC 201/SC 9 were established, so many of them are old and need to be revised in line with the times. The terminology and sample handling have been gradually revised in line with new analytical methods, etc. However, regarding data formats, the rapid pace of technological progress requires data formats based on new concepts and various proposals have been made. The standardization and dissemination of data formats that meet the needs of different users, such as analysts, purchasers of surface analysis services and data scientists, is highly anticipated.