AlScN/GaN HEMTs with 4 A/mm on-current and maximum oscillation frequency >130 GHz
Abstract Aluminum Scandium Nitride (AlScN) is an attractive material for use as a lattice-matched epitaxial barrier layer in GaN high-electron mobility transistors (HEMTs). Here we report the device fabrication, direct current (DC) and radio frequency (RF) characteristics of epitaxial AlScN/AlN/GaN HEMTs on SiC substrates with regrown ohmic contacts. These devices show record high on-current of over 4 A/mm, high cutoff frequency ( f T ) of 92.4 GHz and maximum oscillation frequency ( <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:msub> <mml:mrow> <mml:mi>f</mml:mi> </mml:mrow> <mml:mrow> <mml:mi mathvariant="normal">MAX</mml:mi> </mml:mrow> </mml:msub> </mml:math> ) of 134.3 GHz.
Authors
- Daniel Hannan (ORCID: https://orcid.org/0000-0003-4789-1296)
- Shamima Afroz (ORCID: https://orcid.org/0009-0007-8773-5518)
- Austin Hickman (ORCID: https://orcid.org/0000-0002-6762-1405)
- Kazuki Nomoto
- Thai‐Son Nguyen (ORCID: https://orcid.org/0000-0002-1193-834X)
- Takuya Maeda (ORCID: https://orcid.org/0000-0003-0912-4643)
- Chandrashekhar Savant (ORCID: https://orcid.org/0000-0001-7174-1103)
- Jimy Encomendero (ORCID: https://orcid.org/0000-0002-1597-1761)
- Huili Grace Xing (ORCID: https://orcid.org/0000-0002-2709-3839)
- Ved Gund (ORCID: https://orcid.org/0000-0002-6509-1025)
- Hyunjea Lee
- Joseph Casamento (ORCID: https://orcid.org/0000-0002-8621-1145)
- T. Vasen (ORCID: https://orcid.org/0000-0001-7632-1052)
- Lei Li (ORCID: https://orcid.org/0000-0002-5949-8654)
- James C. M. Hwang (ORCID: https://orcid.org/0000-0002-9738-0411)
- Debdeep Jena
Institutions
- Cornell University (US)
- Northrop Grumman (United States) (US)
Publication Details
- Journal
- Applied Physics Express
- Published
- 2025-01-01
- DOI
- https://doi.org/10.35848/1882-0786/ada86b
- Citations
- 17
- Primary Topic
- GaN-based semiconductor devices and materials
- Type
- article
- Field-Weighted Citation Impact
- 21.39
Funders
- National Science Foundation