International Standardization and Application of Nanoscale Potential Microscopy

Kelvin Probe Force Microscopy (KPFM) is a noncontact variant of atomic force microscopy (AFM) used to measure contact potential difference (CPD) between a probe tip and a sample surface. The sample’s surface potential or work function can be extracted from the measured CPD. Since the surface potential relates to many surface functionalities, KPFM has diverse applications in advanced material and device research. For the quantitative nanoscale measurement of surface potential by KPFM, it is essential to establish the standard protocol using suitable reference materials (RM). This international pre-standardization research via the Versailles Project on Advanced Materials and Standards (VAMAS) aims to establish a practical protocol for quantitative surface potential measurements at the nanoscale. Based on the VAMAS project achievements, the final goal is to develop an international standard through the International Organization for Standardization (ISO).

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Publication Details

Journal
Vacuum and Surface Science
Published
2025-01-09
DOI
https://doi.org/10.1380/vss.68.3
Primary Topic
Integrated Circuits and Semiconductor Failure Analysis
Type
article
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article

International Standardization and Application of Nanoscale Potential Microscopy

Daisuke Fujita
Vacuum and Surface Science
Integrated Circuits and Semiconductor Failure Analysis
article

International Standardization and Application of Nanoscale Potential Microscopy

Daisuke Fujita
article en

Abstract

Kelvin Probe Force Microscopy (KPFM) is a noncontact variant of atomic force microscopy (AFM) used to measure contact potential difference (CPD) between a probe tip and a sample surface. The sample’s surface potential or work function can be extracted from the measured CPD. Since the surface potential relates to many surface functionalities, KPFM has diverse applications in advanced material and device research. For the quantitative nanoscale measurement of surface potential by KPFM, it is essential to establish the standard protocol using suitable reference materials (RM). This international pre-standardization research via the Versailles Project on Advanced Materials and Standards (VAMAS) aims to establish a practical protocol for quantitative surface potential measurements at the nanoscale. Based on the VAMAS project achievements, the final goal is to develop an international standard through the International Organization for Standardization (ISO).

Vacuum and Surface ScienceVol. 68(1)
National Institute for Materials Science (JP), Japan Chemical Analysis Center (JP)
Partnerships for the goals
Openalex Percentile: Top 100%
Integrated Circuits and Semiconductor Failure Analysis
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