International Standardization and Application of Nanoscale Potential Microscopy
Kelvin Probe Force Microscopy (KPFM) is a noncontact variant of atomic force microscopy (AFM) used to measure contact potential difference (CPD) between a probe tip and a sample surface. The sample’s surface potential or work function can be extracted from the measured CPD. Since the surface potential relates to many surface functionalities, KPFM has diverse applications in advanced material and device research. For the quantitative nanoscale measurement of surface potential by KPFM, it is essential to establish the standard protocol using suitable reference materials (RM). This international pre-standardization research via the Versailles Project on Advanced Materials and Standards (VAMAS) aims to establish a practical protocol for quantitative surface potential measurements at the nanoscale. Based on the VAMAS project achievements, the final goal is to develop an international standard through the International Organization for Standardization (ISO).
Authors
- Daisuke Fujita (ORCID: https://orcid.org/0000-0001-7025-0265)
Institutions
- National Institute for Materials Science (JP)
- Japan Chemical Analysis Center (JP)
Publication Details
- Journal
- Vacuum and Surface Science
- Published
- 2025-01-09
- DOI
- https://doi.org/10.1380/vss.68.3
- Primary Topic
- Integrated Circuits and Semiconductor Failure Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00