Reconfigurable electrostatically actuated 1 × 5 rotary MOEMS switch

Optical switches play a critical role in optical communication systems, meeting the growing demand for high-speed data transfer. Among optical switches, micro-opto-electro-mechanical system (MOEMS) switches stand out for their reconfigurability and broadband capability, making them well-suited for applications in data centers. In this article, we present, to our knowledge, a novel 1×5 rotary MOEMS switch actuated by an electrostatic comb-drive for optical networking. The rotary in-plane platform is integrated with silicon nitride (SiN) waveguides, enabling the switch to operate across a broad spectral range in both polarizations. Experimental results demonstrate that the switch platform achieves a rotation of 2.6° in the counterclockwise direction and 2.9° in the clockwise direction, covering five waveguides, with a measured average power loss of -5.57 dB across all channels over the spectrum of 1540 nm to 1625 nm.