Decoupling and preparation of flexible haptic three-dimensional force sensor

An asymmetric capacitive haptic sensor structure with three-dimensional force detection capability has been designed. The sensor unit comprises a upper public electrode, three under electrode plates and fork finger electrodes. Developed a visualization interface for this system by PyQt5. A series of tests were conducted on the sensor, including tensile and flex fatigue tests, single and dynamic pressure performance tests, tangential force performance tests and three-dimensional force tests. The response time of the sensor was found to be 3.5 seconds, while the recovery time was 5.5 seconds. The sensitivity of the Z-axis was 0.081 Kpa-1in the range of 0 to 4.22 Kpa and 0.014 Kpa-1in the range of 4.22 to 29.31 Kpa, the sensitivities in the positive and negative directions of the X-axis was 0.223 pF/N and -0.248 pF/N, while the sensitivities in the positive and negative directions of the Y-axis was 0.242 pF/N and -0.243 pF/N. The tests demonstrates that the sensor exhibited satisfactory flexibility, repeatability, and a linearity of 0.16%, thereby ensuring reliable measurement outcomes.