An investigation of the factors affecting the sensitivity of a MEMS gyro with four sets of bidirectional thermal expansion flows

In this paper, Factors affecting the sensitivity of a MEMS gyro with four sets of bi-directional thermal expansion flows, such as the duty cycle of the heating signal, in order to optimize the operating parameters and enhance performance, the upper chamber gas and other factors are investigated. The variation of the temperature field of the sensitive element is analysed and verified by calculations using COMSOL software, while a 3D model of the gyro is established. The optimized calculation results demonstrate that, under the conditions of the ideal heater frequency of 10 Hz, duty cycle of 60%, and power of 70 mW, the optimized MEMS thermal expansion flow gyroscope has a structural sensitivity of 23.5 mK/°/s when the input angular velocity is in the range of [-400°/s, 400°/s], using the upper chamber with a larger volume and Ar as the upper chamber's warming gas. The nonlinearity is 2.984%. The numerical analysis results extend the idea for the preparation and exploration of the same type of gyro in the future.