Study on response time of <i>Z</i> -axis thermal expansion flow gyroscope

This paper presents a method to derive the gyro response time of thermal expansion flow in Z-axis micro-electro-mechanical systems (MEMS). First, the structure of the thermal expansion gyro is given and its working principle is explained in detail. Secondly, according to the sensitive mechanism of the thermal expansion gyro and its heat transfer mode, the theoretical model of the response time of the thermal expansion gyro is derived, and the calculation formula of the response time of the thermal expansion gyro is given. Finally, in order to verify the response time calculation formula derived in this paper, the finite element method is used. Based on the three-dimensional physical model of the thermal expansion gyro, the theoretical response time of the gyro is calculated and verified. The results of calculation and finite element verification show that: (1) the theoretical model and formula of response time of thermal expansion gyro are in agreement with the verification data; (2) With the increase of the thermal conductivity of the gas, the area of the thermal wire, and the decrease of the specific heat capacity and density of the gas, the response time gradually decreases. (3) The gyro response time calculated for Z-axis thermal expansion flow is 669.88 ms. The formula for calculating the response time of thermal expansion gyro presented in this paper lays a theoretical foundation for optimizing the response time of thermal expansion gyro.