A study of capicitance characteris of metal micro-hemispherical resonant gyro detection

Compared with the traditional quartz hemispherical resonant gyro, the metal micro hemispherical resonant gyro has a stronger high overload capacity and can adapt to more extreme environments, and its capacitance characteristics directly determine the performance of the metal micro hemispherical resonant gyro. In this paper, an oscillator with a diameter of 12 mm is selected, and the capacitance characteristics of the metal micro hemispherical resonant gyro are studied in detail from the two influencing factors of the number of oscillator teeth and capacitance spacing. The finite element simulation of the oscillator has been carried out using finite element software and the capacitive characteristics have been simulated and analyzed. The results show that when the number of teeth of the oscillator is 16 teeth and the capacitance spacing is 0.05 mm, the excited area is enhanced by 460% and the capacitance value increases to 10 pF. This study provides an important theoretical basis for the capacitance design of the resonant gyro with a metal micro hemisphere.