Design and control of a novel 3-DOF parallel MFC micromanipulation platform

In this paper, a three-degree-of-freedom (3-DOF) parallel decoupled micromanipulation platform (PDMP) driven by macro fiber composite (MFC) is designed, and a model recovery anti-saturation (MRAS) control strategy is proposed. Unlike conventional PDMPs, it exhibits a compact design with drive-mechanism integration and 3-DOF parallel decoupling with high natural frequencies. Also, the vibration suppression is transformed into a rate saturation problem, which avoids the micro/nano vibration of the carried flexible structure at the source. An electromechanical coupling dynamics model was established, and an MRAS control strategy combining the robust H ∞ control and magnitude/rate anti-saturation control was proposed. The prototype was finally built, and various experiments were performed. The natural frequency is 627.66 Hz; the x , y , and z motion strokes are 191.2 µm × 192.5 µm × 228.8 µm, with a maximum coupling ratio of 0.599 % and a displacement resolution of 9.86 nm × 10.11 nm × 9.85 nm. In addition, even when the amplitude and rate are limited, the MRAS control strategy can compensate for nonlinear hysteresis, suppress microscopic vibration, shorten settling time, and guarantee high accuracy. Experiments validate the effectiveness of the designed 3-DOF platform and proposed MRAS control strategy.