The Simulation Study of Miro-Inductor Based Planar Spiral MEMS Coil Arrays

The miniaturization of portable electronic devices has driven the demand for smaller electronic components. Traditional inductors limited by conventional manufacturing processes was hard to achieve both small size and high inductance. and are limited by conventional manufacturing processes. Recently, with MEMS technology developing, it is possible to fabricate of high-performance micro-inductor. This paper was aim to design a high-performance micro-inductor based on a planar spiral MEMS coil array. The structure was analyzed and optimized by simulation. The simulation results show that with optimized parameters, the designed micro-inductor significantly improves in inductance value and maximum current-carrying capacity, meeting the application needs of electronic products.