Resolution enhancement methods in optical microscopy for dimensional optical metrology
In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.
Authors
- Miroslav Valtr (ORCID: https://orcid.org/0000-0002-7628-9184)
- Astrid T. Rømer (ORCID: https://orcid.org/0000-0003-4719-2356)
- P. Petrík (ORCID: https://orcid.org/0000-0002-5374-6952)
- Stefanie Kroker (ORCID: https://orcid.org/0000-0002-7584-7359)
- Debdulal Roy (ORCID: https://orcid.org/0000-0002-7528-8649)
- Deshabrato Mukherjee (ORCID: https://orcid.org/0000-0003-4429-9211)
- Bernd Bodermann (ORCID: https://orcid.org/0000-0001-8297-4068)
- Thomas Siefke (ORCID: https://orcid.org/0000-0001-6876-4080)
- Ivano Ruo Berchera (ORCID: https://orcid.org/0000-0003-3131-8866)
- P. Olivero (ORCID: https://orcid.org/0000-0002-7512-6295)
- Pietro Aprà (ORCID: https://orcid.org/0000-0002-0973-3775)
- Himanshu Tyagi (ORCID: https://orcid.org/0000-0001-9070-9838)
- Poul‐Erik Hansen (ORCID: https://orcid.org/0000-0002-1664-8763)
- Mohammad Nouri (ORCID: https://orcid.org/0000-0002-4782-9305)
Publication Details
- Journal
- Journal of the European Optical Society Rapid Publications
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1051/jeos/2025002
- Citations
- 1
- Primary Topic
- Near-Field Optical Microscopy
- Type
- article
- Field-Weighted Citation Impact
- 0.67
Funders
- European Commission
- European Metrology Programme for Innovation and Research