An Improved Frequency-controlled Speed Regulation Method for Piezoelectric Walking Stage

The piezoelectric walking stage (PWS) commonly uses frequency-controlled method for open-loop speed regulation, without considering the rate-dependent feature of piezoelectric actuation on the single-step length. This oversight leads to inaccurate speed and reduced positioning precision of the PWS’s movement. To address this issue, this paper proposes an improved frequency-controlled speed regulation method (ISRM). This method describes the rate-dependent feature phenomenologically and compensates for the impact through precise model calibration of the speed formula. By adjusting the frequency value under value-unchanged voltage signals, it well meets the speed regulation needs of the PWS. Experimental results show that in two sets of speed comparison experiments on the PWS, the open-loop control results of the ISRM significantly outperforms that of the traditional frequency-controlled speed regulation method (TSRM).