Comparison of Diverse Topology Optimization Methods for Optical Proximity Correction Technique

Authors

Sol Ji Han (ORCID: https://orcid.org/0000-0002-8245-3585)
Young Hun Choi (ORCID: https://orcid.org/0000-0001-9894-3645)
Gil Ho Yoon (ORCID: https://orcid.org/0000-0002-0634-8329)
Jae Yeop Na

Publication Details

Journal: Journal of the Computational Structural Engineering Institute of Korea
Published: 2024-12-31
DOI: https://doi.org/10.7734/coseik.2024.37.6.417
Primary Topic: Optical measurement and interference techniques
Type: article
Field-Weighted Citation Impact: 0.00

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article

Comparison of Diverse Topology Optimization Methods for Optical Proximity Correction Technique

Sol Ji Han, Young Hun Choi, Gil Ho Yoon, Jae Yeop Na

Dec 31, 2024

Journal of the Computational Structural Engineering Institute of Korea

Optical measurement and interference techniques

article

Comparison of Diverse Topology Optimization Methods for Optical Proximity Correction Technique

Sol Ji Han, Young Hun Choi, Gil Ho Yoon, Jae Yeop Na

December 31, 2024article en

Abstract

No abstract available for this paper.

Journal of the Computational Structural Engineering Institute of KoreaVol. 37(6)

Openalex Percentile: Top 75%

Optical measurement and interference techniques

DOI Open Access PDF OpenAlex

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Comparison of Diverse Topology Optimization Methods for Optical Proximity Correction Technique — Sol Ji Han, Young Hun Choi, et al. · Journal of the Computational Structural Engineering Institute of Korea (2024) | TGRS Research Map | TGRS