Micro-Transfer Printing of Pre-Fabricated III-V Chiplets on Silicon and Silicon Nitride PICs

We present an approach for integrating pre-fabricated III-V chiplets onto Si/Si<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>N<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> PICs through micro-transfer printing. It allows completion of III-V and Si/Si<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>N<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> processes on their native substrate, while enabling simple integration of multiple III-V functions.