High-Performance Surface Acoustic Wave Filters on Heterogeneous Substrates
In this talk, a new generation surface acoustic wave (SAW) filter technology on heterogeneous substrates was introduced. Our recent progress in the fabrication of piezoelectric thin films and high-performance SAW devices for 5G and Wi-Fi 6/7 applications were presented.
Authors
- Xin Ou (ORCID: https://orcid.org/0000-0002-0316-9958)
- Shibin Zhang (ORCID: https://orcid.org/0000-0001-9928-256X)
- Pengcheng Zheng (ORCID: https://orcid.org/0000-0003-1839-1700)
Institutions
- Shanghai Institute of Microsystem and Information Technology (CN)
Publication Details
- Published
- 2024-11-27
- DOI
- https://doi.org/10.1109/mape62875.2024.10813703
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00