Meter-Length and Crossingless Si<sub>3</sub>N<sub>4</sub> Waveguide with Multimode Euler Bend Towards Integrated Optical Gyroscope Applications

A silicon nitride waveguide chip with multimode Euler bends is proposed and fabricated for integrated optical gyroscope applications. The 1.01-m waveguide achieves 4.8-dB/m attenuation over <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathbf{4300} \times \mathbf{1730}\ \boldsymbol{\mu} \mathbf{m}^{\mathbf{2}}$</tex> footprint, supporting 0.58 deg/s minimum detectable angular rate.

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Publication Details

Published
2024-11-02
DOI
https://doi.org/10.1109/acp/ipoc63121.2024.10809527
Citations
1
Primary Topic
Photonic and Optical Devices
Type
article
Field-Weighted Citation Impact
0.21

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article

Meter-Length and Crossingless Si3N4 Waveguide with Multimode Euler Bend Towards Integrated Optical Gyroscope Applications

Yuming Zhang, Jiangbing Du, Wenlong Zuo, Zuyuan He
1 citations
Photonic and Optical Devices
0.21
article

Meter-Length and Crossingless Si3N4 Waveguide with Multimode Euler Bend Towards Integrated Optical Gyroscope Applications

Yuming Zhang, Jiangbing Du, Wenlong Zuo, Zuyuan He
article en
1 citations

Abstract

A silicon nitride waveguide chip with multimode Euler bends is proposed and fabricated for integrated optical gyroscope applications. The 1.01-m waveguide achieves 4.8-dB/m attenuation over <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathbf{4300} \times \mathbf{1730}\ \boldsymbol{\mu} \mathbf{m}^{\mathbf{2}}$</tex> footprint, supporting 0.58 deg/s minimum detectable angular rate.

Shanghai Jiao Tong University (CN)
National Natural Science Foundation of China, National Key Research and Development Program of China
Openalex Percentile: Top 44%
Photonic and Optical Devices
0.21
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