Spray-deposition of MoS₂ Thin Films and Their Application in Biosensors

In this work, the influence of the parameters of ultrasonic deposition of water solution of MoS<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> was studied and sensing structures for sweat biomarkers were fabricated using the optimal parameters. The optimal flow rate of the ultrasonically atomized solution was determined to be 0.2 mL/min. Mo and Ni electrodes were deposited by vacuum sputtering and their effect on the response of the produced chemoresistive sensors was investigated. The sensitivity of the structures was measured under the influence of NH<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>, NaCl and MgCl<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>. The most stable response was from sensors with Mo electrodes towards NH<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>.