Design and Simulation of a 2-D Electromagnetic Driven Micromirror

A new type of electromagnetic driven scanning micromirror is designed in this paper. This paper mainly optimizes the structure of the driving electromagnet of the scanning micromirror system. The electromagnet consists of an outer ring magnet and an inner cylinder magnet, which can drive the motion of the two-dimensional scanning micromirror. And Comsol Multiphysics software was used to simulate and analyze the micro mirror, and we obtained the resonant frequency of the micromirror. The resonant frequency of the slow axis was 153.04Hz, and the resonant frequency of the fast axis was 1092.8Hz. The deflection at different frequencies is obtained by simulation. When the micromirror works in quasistatic mode and the driving current is 0.1A, the deflection Angle at 50Hz is 3.5 degrees. When working in resonant state and the driving current is 0.06A, the frequency is 1092.8Hz, the deflection Angle of the micromirror is 6.5 degrees. The deflection angles of two motion modes under different current are obtained, which proves the rationality of the design.