MEMS in Robotics: From Fundamental Design to Cutting-edge Innovation

Applications from microelectromechanical systems (MEMS) technology to robotics are developing rapidly. Their unique miniaturization, high precision, and cost-effective features make them indispensable to modern robotics. This article examines the key applications of MEMS technology in robotics and thoroughly analyses how MEMS sensors and micro-actuators can revolutionize robotics by improving operational accuracy, reliability, and cost-effectiveness. Through a comprehensive review of the existing literature and a detailed analysis of multiple case studies, this study reveals innovative applications of MEMS technology in many fields, including medical robotics, exploratory robotics, and industrial automation. The paper also addresses several challenges in promoting MEMS applications, including the complexity of manufacturing technology, cost control, and equipment durability issues. A series of resolution strategies have been proposed to address these challenges, including adopting new materials, improved design, and adopting advanced manufacturing technologies, which are key factors in ensuring the reliable operation of MEMS equipment under strict conditions. In the future, MEMS technology is expected to play an even greater role in the field of intelligence and automation as the technology develops. MEMS technology can not only stimulate advances in robotics but should also stimulate technological innovation in broader fields such as medicine, environmental monitoring, and consumer electronics. Through continuous research and development, MEMS technology will continue to optimize its performance and range of applications, bringing revolutionary advances in robotics and other related fields.