Five-Terminal Dual-Polarity MEMS Electrostatic Transducer For Near-Limits Kinetic Energy Harvesting From Irregular Vibrations
This paper presents the design, fabrication, and testing of the first silicon electrostatic MEMS device specifically engineered to implement the near-limits kinetic energy harvesting (NL-KEH) principle. A novel five-terminal dual-polarity MEMS transducer is fabricated and experimentally evaluated, demonstrating its potential for improved vibration energy harvesting performance.
Authors
- Francisco Ambia (ORCID: https://orcid.org/0009-0000-7524-6521)
- Moein Rahmani (ORCID: https://orcid.org/0000-0002-5882-4665)
- Dimitri Galayko (ORCID: https://orcid.org/0000-0002-7056-7489)
- Élie Lefeuvre (ORCID: https://orcid.org/0000-0002-2482-240X)
- Alexis Brenes (ORCID: https://orcid.org/0000-0002-3052-1179)
- Philippe Basset (ORCID: https://orcid.org/0000-0002-9790-8247)
- Armine Karami (ORCID: https://orcid.org/0000-0003-0015-9284)
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université Paris Cité (FR)
- Université Paris-Saclay (FR)
- Sorbonne Université (FR)
- Centre de Nanosciences et de Nanotechnologies (FR)
- Université Gustave Eiffel (FR)
- LIP6 (FR)
- Laboratoire d'électronique, systèmes de communication et microsystèmes (FR)
Publication Details
- Published
- 2024-11-18
- DOI
- https://doi.org/10.1109/powermems63147.2024.10814232
- Citations
- 1
- Primary Topic
- Innovative Energy Harvesting Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.21
Funders
- Agence Nationale de la Recherche