Impact-Induced Frequency Up-Conversion Vibration Energy Harvester Based On Metal-Substrate Piezoelectric Thick Film

This paper presents an impact-induced frequency up-conversion piezoelectric energy harvester (FUC-PEH) to improve low-frequency output performance. The FUC-PEH includes a high-frequency piezoelectric cantilever (HFPC) with resonant frequency of 210 Hz and a low-frequency S-shaped stainless-steel cantilever (LFSC) with resonant frequency of 30 Hz. The HFPC is manufactured using MEMS metal-substrate lead zirconate titanate (PZT) thick film technology. The peak open-circuit voltage of FUC-PEH reaches 54.6 V over a drive frequency range of 10 to 60 Hz, which is $80 \%$ higher than that of a single HFPC in resonant state. It is expected to replace primary batteries and used as the power source for wireless sensor nodes. In addition, the low-frequency I-shaped stainless-steel cantilever (LFC-I), II-shaped cantilever (LFC-II) and III-shaped cantilever (LFC-III) are fabricated to explore the influence of the stiffness of low-frequency cantilever, the size of proof mass and the gap distance on the output performance of FUC-PEH.