Development of Micro-Structural Waste Heat Utilized Power Generator With Silicon and Refrigerant

This research proposes a silicon monolithic ORC (organic Rankine cycle) system and an integrated turbine rotor to realize a miniature waste heat utilized power generation system. The developed ORC system using MEMS (Micro ElectroMechanical Systems) technology had a boiler tank, flow paths, and a turbine rotor inside a millimeter-sized monolithic structure. The turbine rotor was based on a planar structure with a built-in magnet to be enclosed inside the system, and showed rotational motion by refrigerant, with a maximum speed of $48,780 \mathrm{~rpm}$. It suggested the possibility of miniaturization by combining MEMS technology and refrigerant.