Desing of Mems Vibrational Energy Harvesters Using Miucro-Cavity Structures With Self-Aseembled Electrets

This paper reports a design methodology for micro-electro-mechanical systems (MEMS) vibrational energy harvesters (VEHs) using micro-cavity (MC) structures with self-assembled electrets (SAEs). Unlike the previous micro-patterned SAE design [1], we propose a SAE-filled MC structure. With this structure, the air gap and SAE film thickness in SAE-MEMS VEHs can be designed without interfering with each other. The SAE film thickness and surface potential have a proportional relationship. Thus, when a high surface potential is required, this methodology is highly effective in increasing the SAE film thickness without being restricted by the air gap.