FORMATION OF OHMIC CONTACT IN MICROELECTRONIC DEVICES WITH POROUS SURFACE SUBSTRATES

In the technology of instrument-making, in particular the technology of the element base of electronics (hybrid integrated circuits, sensors for various purposes, etc.), which uses ensembles of nanoparticles of semiconductor and other materials in a porous matrix, there are often problems with the formation of ohmic contacts to the specified systems. Especially when materials with a porous surface are used as substrates. And, as is known, the quality of contacts mainly determines the reliability of devices, systems and radio-electronic equipment in general. We have proposed and investigated a new effective method of forming an ohmic contact on substrates with a porous surface, in particular, glass.