First in‐Vacuum In Situ X‐ <scp>AFM</scp> / <scp>XRF</scp> / <scp>STXM</scp> Soft X‐Rays Combination Measurements and Characterization

ABSTRACT This manuscript details the advancements in developing a unique multimodal imaging setup, specifically the integration of X‐AFM on a synchrotron beamline that currently combines STXM and XRF. This triplet configuration operates within the soft x‐ray regime (&lt; 2.5 keV) and necessitates high vacuum instrumentation, targeting sub‐micrometric applications with nanometric precision. Building on a previously successful prototype, the paper presents the current setup, the challenges encountered, and the solutions implemented. Additionally, it highlights significant custom developments in specialized electronics that enabled practical utilization of the new instrument. In particular, multiple samples, including asbestos fibers from a broader high‐impact research project, were measured and characterized in situ for the first time. The overall performance is critically evaluated through an ex‐situ comparison with a commercial single‐modality AFM system. Finally, the manuscript discusses the roadmap for future advancements in related instrumentation, methods, and applications.