Microstructure Embossing Patterning Using Resonated Droplets Dynamic Behavior Induced by Vertical Vibration

Abstract This paper introduces a novel, ecofriendly, and cost‐effective method to create deformation patterns on vertically vibrating thin film surfaces using resonant sessile droplets. The key findings emphasize the critical role of resonant frequency and vibration velocity in the formation of these deformations. Through theoretical and experimental investigations on aluminum thin film, it is validated that the deformations are influenced by the energy distribution within the resonant droplets. Specifically, higher‐order resonant frequencies produce a more concentrated energy distribution at the droplet's center due to internal top‐down flow behaviors, resulting in various deformation states. By observing regularities in deformation width patterns, the underlying phenomena are elucidated, and derive related empirical formulas. This method demonstrates significant potential for surface microstructure fabrication. The ability to control deformation shapes by adjusting vibration parameters is crucial for optimizing microfabrication processes.