Performance of PVA-SnO₂ and PVA-ZnO as Sensing Materials for Thick Film Resistive Type Humidity Sensors

This study compares the performance between PVA-SnO2 with PVA-ZnO as a sensitive layer material for resistive humidity sensor. The sensor was fabricated using thick film technology with screen printing method, while the sensitive layer was deposited using spin coating. Electrical resistance testing was carried out in a chamber with a humidity level of 60$\mathbf{9 0 \%}$ RH. Metal oxide as a sensitive layer material varied in mass concentration by 5% and 10% against PVA. The test results show that the F6 PVA-ZnO 5% humidity sensor has a better response with lower resistance of $1.38 \times 10^{7}$ than $\mathrm{PVA-SnO} \mathrm{O}_{2} 5 \%$ of $1.71 \times 10^{7}$ at a relative humidity 60% RH. However, the PVA$\mathrm{SnO}_{2} \mathbf{1 0 \%}$ humidity sensor showed better linearity than PVA$\mathrm{ZnO} \mathbf{1 0 \%}$ over the humidity range tested.