A fins-shaped bidirectional linear ultrasonic motor driven by a single-phase signal

Abstract Inspired by the propulsion mechanism of fish swimming through tail-fin oscillations, we have developed and experimentally studied a high-performance miniature bending vibration linear ultrasonic motor driven by a single-phase standing wave. A symmetrical structural design achieves bidirectional motion with consistent output characteristics. Two lead zirconate titanate (PZT) piezoelectric patches are symmetrically distributed on a metal elastic body’s upper and lower sides. In the stator, a sinusoidal signal is applied only to the piezoelectric patch on one side, while the patch on the opposite side is either left open or short-circuited to the ground. This results in an asymmetry in the structural damping between the upper and lower sides of the stator. The first-order bending vibration of the stator generates displacement in an inclined direction at the end of the driving foot. The motor achieves forward and backward motion by applying the same voltage to the piezoelectric patches on different sides. The dimensions of the stator have been finalized, and a prototype of the designed motor has been fabricated. Subsequent experimental tests were conducted to evaluate the prototype’s performance, including its mechanical output characteristics. At a frequency of 138.3 kHz, the maximum speed of the motor without load is 134.58 mm s −1 . Under a voltage of 200 V p-p and a preload of 3 N, the motor’s maximum output thrust is approximately 0.3 N. The actual mass of the motor is approximately 1.2 g, resulting in a thrust-to-weight ratio of 25.