Fabrication Development of High-Performance Fractal Superconducting Nanowire Single-Photon Detectors

Fractal superconducting nanowire single-photon detectors (SNSPDs) have been demonstrated with high system detection efficiency for incident photons in all states of polarization. This paper aims at presenting the nano- and mico-fabrication development of the high-performance fractal SNSPDs, with particular emphasis on the important experimental nuances that are key to the success of these devices. We believe that the paper will benefit the community by facilitating the fabrication of the fractal SNSPDs, and therefore, more advanced devices, based on the fractal SNSPDs, but with additional functionality, can be made and developed in the future.