12-Spin-Qubit Arrays Fabricated on a 300 mm Semiconductor Manufacturing Line
Intel's efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes as well as production-level process control. We present key device features and fabrication details as well as qubit characterization results confirming device functionality. These results corroborate our fabrication methods and are a crucial step toward scaling of extensible 2D qubit array schemes.
Authors
- R. Pillarisetty
- Fahd A. Mohiyaddin (ORCID: https://orcid.org/0000-0002-7428-9826)
- James S. Clarke (ORCID: https://orcid.org/0000-0002-7917-0998)
- Otto Zietz (ORCID: https://orcid.org/0000-0002-5689-8070)
- Hubert C. George
- N. C. Bishop (ORCID: https://orcid.org/0000-0001-6756-1740)
- Samuel F. Neyens (ORCID: https://orcid.org/0000-0003-0275-7026)
- Stephanie A. Bojarski
- Eric Henry
- Matthew Curry (ORCID: https://orcid.org/0000-0001-9352-5727)
- Rambert K. Nahm (ORCID: https://orcid.org/0000-0002-9569-9509)
- Daniel Keith (ORCID: https://orcid.org/0000-0001-7990-3189)
- Rostyslav Savytskyy (ORCID: https://orcid.org/0000-0002-8204-5063)
- M. Harper
- Felix Borjans (ORCID: https://orcid.org/0000-0002-9652-097X)
- Stefano Pellerano
- Aditi Nethwewala (ORCID: https://orcid.org/0000-0001-5604-4799)
- J. Corrigan
- Carly Rogan
- Florian Luthi
- Elliot J. Connors (ORCID: https://orcid.org/0000-0003-1507-470X)
- Jonas D. Ziegler (ORCID: https://orcid.org/0000-0002-2683-5124)
- Thomas F. Watson
- Rohit Nair (ORCID: https://orcid.org/0000-0001-6743-2674)
- Mateusz Mądzik (ORCID: https://orcid.org/0000-0003-4857-3257)
- Bishnu Patra (ORCID: https://orcid.org/0000-0003-1913-1337)
- Sandra Murcia
- Mohammad Monirul Islam (ORCID: https://orcid.org/0000-0001-6532-4303)
- Andrew Wagner
- J. M. Roberts (ORCID: https://orcid.org/0009-0006-4112-9857)
- Lester Lampert
- Roy D. Raharjo
Institutions
- Intel (United States) (US)
- Intel (United Kingdom) (GB)
Publication Details
- Journal
- Nano Letters
- Published
- 2024-12-25
- DOI
- https://doi.org/10.1021/acs.nanolett.4c05205
- Citations
- 35
- Primary Topic
- Quantum and electron transport phenomena
- Type
- article
- Field-Weighted Citation Impact
- 11.81