Modeling scale-up of particle coating by atomic layer deposition

Atomic layer deposition (ALD) is a promising technique to functionalize particle surfaces for energy applications including energy storage, catalysis, and decarbonization. In this work, we present a set of models of ALD particle coating to explore the transition from lab scale to manufacturing. Our models encompass the main particle coating manufacturing approaches including rotary bed, fluidized bed, and continuously vibrating reactors. These models provide key metrics, such as throughput and precursor utilization, required to evaluate the scalability of ALD manufacturing approaches and their feasibility in the context of energy applications. Our results show that designs that force the precursor to flow through fluidized particles transition faster to a transport-limited regime where throughput is maximized. They also exhibit higher precursor utilization. In the context of continuous processes, our models indicate that it is possible to achieve self-extinguishing processes with almost 100% precursor utilization. A comparison with past experimental results of ALD in fluidized bed reactors shows excellent qualitative and quantitative agreement.

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Publication Details

Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Published
2024-12-24
DOI
https://doi.org/10.1116/6.0004006
Citations
6
Primary Topic
Semiconductor materials and devices
Type
article
Field-Weighted Citation Impact
1.25

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article

Modeling scale-up of particle coating by atomic layer deposition

Ángel Yanguas-Gil, Jeffrey W. Elam
6 citations
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Semiconductor materials and devices
1.25
article

Modeling scale-up of particle coating by atomic layer deposition

Ángel Yanguas-Gil, Jeffrey W. Elam
article en
6 citations

Abstract

Atomic layer deposition (ALD) is a promising technique to functionalize particle surfaces for energy applications including energy storage, catalysis, and decarbonization. In this work, we present a set of models of ALD particle coating to explore the transition from lab scale to manufacturing. Our models encompass the main particle coating manufacturing approaches including rotary bed, fluidized bed, and continuously vibrating reactors. These models provide key metrics, such as throughput and precursor utilization, required to evaluate the scalability of ALD manufacturing approaches and their feasibility in the context of energy applications. Our results show that designs that force the precursor to flow through fluidized particles transition faster to a transport-limited regime where throughput is maximized. They also exhibit higher precursor utilization. In the context of continuous processes, our models indicate that it is possible to achieve self-extinguishing processes with almost 100% precursor utilization. A comparison with past experimental results of ALD in fluidized bed reactors shows excellent qualitative and quantitative agreement.

Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsVol. 43(1)
Argonne National Laboratory (US)
BIRD Foundation, Laboratory Directed Research and Development
Affordable and clean energy
Openalex Percentile: Top 19%
Semiconductor materials and devices
1.25
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