Effect of Sb Dopant in Growth of r-GeO2 Thin Films
Sb doped rutile-GeO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>thin films were grown on rutile- Ti02 substrates varying the growth temperatures. The sample grown under 700°C shows FWHM of XRC as 694 arcsec.
Authors
- Takayuki Ibi
- Kentaro Kaneko (ORCID: https://orcid.org/0000-0001-6626-7611)
- Isao Takahashi (ORCID: https://orcid.org/0000-0003-0416-5462)
- Yukiko Shimizu
- Toya Yagura
Institutions
- Ritsumeikan University (JP)
- Japan Patent Office (JP)
Publication Details
- Published
- 2024-11-13
- DOI
- https://doi.org/10.1109/icsj62869.2024.10804741
- Primary Topic
- Silicon Nanostructures and Photoluminescence
- Type
- article
- Field-Weighted Citation Impact
- 0.00