Implementation of Curved CMOS Image Sensors by Transferring Silicon-On-Insulator Layers
We present curved complementary metal-oxide-semiconductor image sensors using silicon-on-insulator (SOI) technologies. A 11-µm-thick SOI layer was curved into a cylindrical concave shape. The sensor successfully captured video images while effectively correcting lens aberrations.
Authors
- Shigeyuki Imura (ORCID: https://orcid.org/0000-0002-1682-9193)
- Masahide Goto (ORCID: https://orcid.org/0000-0002-1388-4488)
- Hiroto Sato (ORCID: https://orcid.org/0009-0009-1659-2809)
Publication Details
- Published
- 2024-11-13
- DOI
- https://doi.org/10.1109/icsj62869.2024.10804744
- Primary Topic
- CCD and CMOS Imaging Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.00