Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer
In this study, Si/Si pairs were bonded underwater using perhydropolysilazane(PHPS), and the bonding strengths were measured and peeled surfaces were analyzed. As a result, high-strength bonding was obtained while promoting silica conversion of PHPS.
Authors
- Kai Takeuchi (ORCID: https://orcid.org/0000-0002-5700-3662)
- Eiji Higurashi (ORCID: https://orcid.org/0000-0002-7154-4203)
- Daiki Nemoto
Institutions
- Tohoku University (JP)
Publication Details
- Published
- 2024-11-13
- DOI
- https://doi.org/10.1109/icsj62869.2024.10804705
- Primary Topic
- Electrophoretic Deposition in Materials Science
- Type
- article
- Field-Weighted Citation Impact
- 0.00