Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer

In this study, Si/Si pairs were bonded underwater using perhydropolysilazane(PHPS), and the bonding strengths were measured and peeled surfaces were analyzed. As a result, high-strength bonding was obtained while promoting silica conversion of PHPS.

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Published
2024-11-13
DOI
https://doi.org/10.1109/icsj62869.2024.10804705
Primary Topic
Electrophoretic Deposition in Materials Science
Type
article
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article

Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer

Kai Takeuchi, Eiji Higurashi, Daiki Nemoto
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Electrophoretic Deposition in Materials Science
article

Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer

Kai Takeuchi, Eiji Higurashi, Daiki Nemoto
article en

Abstract

In this study, Si/Si pairs were bonded underwater using perhydropolysilazane(PHPS), and the bonding strengths were measured and peeled surfaces were analyzed. As a result, high-strength bonding was obtained while promoting silica conversion of PHPS.

Tohoku University (JP)
Clean water and sanitation
Openalex Percentile: Top 78%
Electrophoretic Deposition in Materials Science
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Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer — Kai Takeuchi, Eiji Higurashi, et al. · (2024) | TGRS Research Map | TGRS