Five-sided Protection of the Chip with Bump Support Film Impact Resistance
A new BSF which can protect multi-sides (MP-BSF) is developed. By softening the hardness, the MP-BSF layer can embed the dicing kerf with no air bubbles. With MP-BSF, the chip can be protected from impact compared to the normal Si chip.
Authors
- Keisuke Shinomiya
- Takuo Nishida
- Reina Kainuma
- Rikiya Kobashi
Institutions
- Lintec Corporation (Japan) (JP)
Publication Details
- Published
- 2024-11-13
- DOI
- https://doi.org/10.1109/icsj62869.2024.10804672
- Citations
- 1
- Primary Topic
- Integrated Circuits and Semiconductor Failure Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.21